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Joint Development Agreement with National Yang Ming Chiao Tung University in Taiwan
Taiwan’s National Yang Ming Chiao Tung University (located in Hsinchu City, Taiwan, referred to as Chiao Tung University) and SPP Technologies Inc. (based in Chiyoda-ku, Tokyo, President: Toshihiro Hayami, referred to as SPP Technologies) have reached an agreement for collaborative development in Taiwan of a large-diameter neutral beam atomic layer etching, deposition, and bonding process. They have recently finalized the contract for this venture.
The neutral beam technology is an ultra-cutting-edge microfabrication technique invented by Professor Seiji Samukawa of Chiao Tung University during his tenure at Tohoku University before joining the former. The advancement of this technology into cutting-edge devices has been actively pursued for the past five years within an institution established based on the inter-university agreement between Tohoku University and Chiao Tung University (Yang Ming Chiao Tung University/Tohoku University Joint Research Center). Numerous research findings have already been published. With the professor’s transfer to Chiao Tung University in August 2022, efforts have commenced towards new research aimed at industrializing this technology in Taiwan, taking into account insights from prominent local semiconductor device manufacturers.
Our initial goal is to develop a mass production system compatible with 8-inch substrates for compound semiconductors by 2025, followed by targeting the development of a mass production system for cutting-edge silicon technology using 12-inch substrates by 2027. Atomic layer etching, deposition, and bonding technology are anticipated to be indispensable for future ultra-cutting-edge devices beyond 2 nanometers, and we are committed to contributing in this area. The neutral beam technology presents significantly lower substrate damage compared to conventional atomic layer etching, deposition, and bonding techniques. Leveraging this advantage, our aim is to develop devices that align with state-of-the-art semiconductor manufacturing processes.
In the course of our development, we are actively promoting collaboration with local equipment manufacturers and semiconductor companies in Taiwan. Our aim is to achieve mass production aligned with Taiwan’s ecosystem promptly. Additionally, we are committed to pioneering the development of cutting-edge mass production equipment through a novel approach of Japan-Taiwan international industry-academic cooperation. [Initial Issuance on September 22, 2023]
Contacts
Marketing
Nozomi Egashira
https://www.spp-technologies.co.jp/inquiry/
Disclaimer: This press release is a translation of the original announcement titled “台湾国立陽明交通大学との共同開発契約について (Original)” published on December 26, 2023. In case of any updates or changes to the Japanese version, the Japanese version will take precedence.

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