Products 

Products Category

Silicon deep etching

Mass-production silicon deep etching equipment

Mass-production silicon deep etching equipment Predeus / Proxion

The Si Deep RIE System is a silicon deep-etching machine for mass production, which is established by adding unique technology to the Bosch process. It is suitable for MEMS and semiconductors.

 300mm Mass-production silicon deep etching equipment

300mmMass-production silicon deep etching equipment

Mass-production silicon deep etching equipment for MEMS and semiconductor applications, established by adding proprietary technologies to the Bosch process.

Other Material etching

SiC, compound/oxide film etching equipment

SiC, compound/oxide film etching equipment Spica / Sirius

Etching equipment for challenging materials, including compound semiconductors and optical devices.

Sacrificial Layer Etching

SiO2 Sacrificial Layer Etching System

SiO2 Sacrificial Layer Etching System Vetelgeuse

Fluoride (HF) and Ammonia (NH3) for MEMS industry use.

Deposition / Heat treatment

Oxide/nitride film deposition equipment

Oxide/nitride film deposition equipment Cetus

Plasma deposition equipment for forming low-stress silicon nitride films and thick silicon oxide films.

 Thermal processing equipment (vertical furnace)

Thermal processing equipment (vertical furnace)AVP/RVP-300 manufactured by SPT Microtechnologies USA

Thermal processing equipment capable of providing optimal processes with high throughput for a wide range of requirements.

Contact About Equipment

+81 6-6489-5997

Get Product Support

+81 6-6489-5848

Contact About Equipment

+81664895997

Get Product Support

+81664895848

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